Miscellaneous
Buffer pressure limits
We noticed some error in the buffer PCU. It is likely due to the vacuum limits are too high to maintain, and there is some time limit on how long the primary/ rough pump can be ON continuously. We need to relax the pressure limits as follows:
MG Low: 2.00e-01 mbar
MG High: 6.00e-01 mbar
FG Low: 5.00e-01 mbar
FG High: 6.00e-01 mbar.
SPIN PCU FV Pump Work Time warning
In order to clear the warning, go to Settings → Advanced Options → FV Pump Work Time → Reset.
Edwards scroll pump
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Reset service warning: Press and hold the standby speed increase and decrease buttons simultaneously for 5 sec.
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Auto start: Press and hold either the Power ON or OFF button for 8 sec.